What thickness of the piezoelectric layer with high breakdown voltage is required for the microactuator?

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 5 B, 2002, Pages 3344-3347

  Lebedev, Maxim ^a   Akedo, Jun ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Aerosol deposition method; Lead zirconate titanate; Microactuator; Optical scanner; Piezoelectric film

Indexed keywords

ELASTIC MODULI; ELECTRIC BREAKDOWN; ELECTRIC FIELDS; PIEZOELECTRIC DEVICES;

AEROSOL DEPOSITION METHOD; LEAD ZIRCONATE TITANATE; PIEZOELECTRIC LAYER;

MICROACTUATORS;

EID: 0036578531     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.3344     Document Type: Article

References (15)