Leakage current in PZT films with sputtered RuOx electrodes

Solid-State Electronics

Volumn 44, Issue 9, 2000, Pages 1569-1571

  Law, C W ^a   Tong, K Y ^a   Li, J H ^b   Li, K ^b  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^b CHANGZHOU UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITORS; CORRELATION METHODS; DEGRADATION; ELECTRODES; LEAKAGE CURRENTS; RUTHENIUM COMPOUNDS; SOL-GELS; SPUTTER DEPOSITION; THIN FILMS;

REACTIVE SPUTTERING; SOL-GEL CAPACITORS;

DIELECTRIC FILMS;

EID: 0034273132     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(00)00102-7     Document Type: Article

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