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Volumn 1, Issue , 2000, Pages 455-458

Dynamic properties of PZT thick films structured on Si membrane by the aerosol deposition method

Author keywords

[No Author keywords available]

Indexed keywords

AEROSOLS; ANNEALING; DEPOSITION; DYNAMICS; MEMBRANES; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; SILICON; THERMAL EFFECTS; THICK FILMS;

EID: 0034473601     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (3)

References (18)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.