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Volumn 1, Issue , 2000, Pages 455-458
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Dynamic properties of PZT thick films structured on Si membrane by the aerosol deposition method
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Author keywords
[No Author keywords available]
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Indexed keywords
AEROSOLS;
ANNEALING;
DEPOSITION;
DYNAMICS;
MEMBRANES;
MICROELECTROMECHANICAL DEVICES;
MICROELECTRONIC PROCESSING;
SILICON;
THERMAL EFFECTS;
THICK FILMS;
AEROSOL DEPOSITION METHOD;
DYNAMIC ACTUATION PROPERTIES;
LEAD ZIRCONATE TITANATE;
SILICON MEMBRANE;
LEAD COMPOUNDS;
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EID: 0034473601
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (3)
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References (18)
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