Electrical properties of direct deposited piezoelectric thick film formed by gas deposition method annealing effect of the deposited films

Ferroelectrics

Volumn 231, Issue 1 -4 pt 3, 1999, Pages 285-292

  Akedo, Jun ^a   Minami, Noriaki ^a   Fukuda, Kouji ^b   Ichiki, Masaaki ^a   Maeda, Ryutaro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Honda Engineering CoLtd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ANNEALING; DEPOSITION; ELECTRIC PROPERTIES; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; POLARIZATION; THICK FILMS;

GAS DEPOSITION; LEAD ZIRCONIUM TITANATE; MICROELECTROMECHANICAL SYSTEMS; ULTRAFINE PARTICLES;

PIEZOELECTRIC MATERIALS;

EID: 0033320007     PISSN: 00150193     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/00150199908014545     Document Type: Article

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