Leakage current characteristics of lead-zirconate-titanate thin film capacitors for memory device applications

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 7, 1998, Pages 4056-4060

  Chen, Hong Ming ^a   Tsaur, Sheng Wei ^a   Lee, Joseph Ya Min ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Debye type electric polarization; Electronic conduction current; Ferroelectric; Lead zirconate titanate thin film capacitor; Leakage current mechanism; Ohmic conduction; Polarization current; Poole Frenkel emission

Indexed keywords

ELECTRIC CURRENTS; FERROELECTRIC MATERIALS; THIN FILMS; TITANATE MINERALS;

MEMORY DEVICE APPLICATIONS; POOLE-FRENKEL EMISSION;

CAPACITORS;

EID: 0032115370     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.37.4056     Document Type: Article

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