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Volumn 42, Issue 9 A, 2003, Pages 5415-5419
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High-resolution photoinduced transient spectroscopy of electrically active iron-related defects in electron irradiated high-resistivity silicon
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Author keywords
Defects in Si; HRPITS; Iron related defects; Irradiation defects
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Indexed keywords
ACTIVATION ENERGY;
ANNEALING;
ATOMS;
COMPOSITION EFFECTS;
CRYSTAL DEFECTS;
ELECTRIC RESISTANCE;
ELECTRON IRRADIATION;
ELECTRON SPIN RESONANCE SPECTROSCOPY;
ELECTRON TRAPS;
IRON;
THERMAL EFFECTS;
THERMODYNAMIC STABILITY;
HIGH RESOLUTION PHOTOINDUCED TRANSIENT SPECTROSCOPY;
IRON RELATED DEFECTS;
IRRADIATION DEFECTS;
VACANCY COMPLEX;
SILICON;
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EID: 0344552940
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.42.5415 Document Type: Article |
Times cited : (16)
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References (29)
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