Formation of electrically active defects in neutron irradiated silicon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 186, Issue 1-4, 2002, Pages 152-156

  Kaminski, P ^a   Kozlowski, R ^a   Nossarzewska Orlowska, E ^a  

^a ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

Author keywords

HRPITS; Radiation defects; Silicon; Traps

Indexed keywords

ACTIVATION ENERGY; DOPING (ADDITIVES); ELECTRON TRAPS; NEUTRON IRRADIATION; OXYGEN; RADIATION DAMAGE; SEMICONDUCTING SILICON;

HIGH-RESOLUTION PHOTOINDUCED TRANSIENT SPECTROSCOPY (HRPITS);

DEFECTS;

EID: 0036136471     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00889-8     Document Type: Article

References (12)