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Volumn 74, Issue 11, 2003, Pages 4745-4749
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Simplified system based on photoelastic modulation technique for low-level birefringence measurement
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Author keywords
[No Author keywords available]
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Indexed keywords
ALGORITHMS;
APPROXIMATION THEORY;
BIREFRINGENCE;
LIGHT MODULATORS;
RESIDUAL STRESSES;
SCANNING;
SIGNAL PROCESSING;
SILICON WAFERS;
LOW-LEVEL BIREFRINGENCE DETECTION (LLBD);
PHOTOELASTIC MODULATION;
PHOTOELASTICITY;
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EID: 0344515261
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1614875 Document Type: Article |
Times cited : (19)
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References (14)
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