Effects of deposition temperature on the structure of amorphous carbon nitride films

Solid State Communications

Volumn 129, Issue 2, 2004, Pages 139-142

  Therasse, M ^a   Benlahsen, M ^a  

^a Universite de Picardie Jules Verne   (France)

Author keywords

A. Disordered systems; A. Surface and interfaces; A. Thin films; D. Mechanical properties

Indexed keywords

ABSORPTION; AMORPHOUS FILMS; CHEMICAL BONDS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; FREE RADICALS; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; RESIDUAL STRESSES; THIN FILMS;

IMPACT ENERGY;

CARBON NITRIDE;

EID: 0242611567     PISSN: 00381098     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1098(03)00557-X     Document Type: Article

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