Vibrational and optical properties of carbon nitride films prepared by reactive magnetron sputtering

Journal of Physics Condensed Matter

Volumn 11, Issue 26, 1999, Pages 5225-5235

  Mendez J M ^a,c   Gaona Couto, A ^a   Muhl, S ^a   Jimenez Sandoval S ^b  

^a INSTITUTO DE INVESTIGACIONES EN MATERIALES   (Mexico)

^b INSTITUTO POLITÉCNICO NACIONAL   (Mexico)

^c YORK UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; COMPOSITION EFFECTS; ELLIPSOMETRY; INFRARED SPECTROSCOPY; ION BOMBARDMENT; MAGNETRON SPUTTERING; MOLECULAR STRUCTURE; MOLECULAR VIBRATIONS; NITRIDES; RAMAN SPECTROSCOPY; REFRACTIVE INDEX; ULTRAVIOLET SPECTROGRAPHS;

CARBON NITRIDE;

OPTICAL FILMS;

EID: 0032593924     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/11/26/323     Document Type: Article

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