A computational investigation of the effects of varying discharge geometry for an inductively coupled plasma

IEEE Transactions on Plasma Science

Volumn 28, Issue 6, 2000, Pages 2214-2231

  Christlieb, Andrew J ^a   Nick Hitchon, W ^a   Keiler, Eric R ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

Boltzmann equation; complex geometry; convected scheme; fluid model; hybrid model; kinetic transport model; mobility; unstructured mesh

Indexed keywords

CARRIER CONCENTRATION; ELECTRIC DISCHARGES; ELECTRON TRANSPORT PROPERTIES; INDUCTIVELY COUPLED PLASMA; IONIZATION OF GASES; KINETIC THEORY; MATHEMATICAL MODELS; PLASMA DENSITY;

BOLTZMANN TRANSPORT EQUATION (BTE); CONVECTED SCHEME; SPHERICAL HARMONIC EXPANSION (SHE);

PLASMA SOURCES;

EID: 0034462134     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.902250     Document Type: Article

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