Recent progress in the understanding of electron kinetics in low-pressure inductive plasmas

Applied Surface Science

Volumn 192, Issue 1-4, 2002, Pages 244-257

  Kortshagen, U ^a   Maresca, A ^a   Orlov, K ^a   Heil, B ^a,b  

^a University of Minnesota   (United States)

^b SCI Systems   (United States)

Author keywords

Diffusion electron cooling; Electron fluxes; Low pressure inductive plasma; Nonlocal electron kinetics

Indexed keywords

COOLING; DIFFUSION; ELECTRON ENERGY LEVELS; ELECTRONS; KINETIC THEORY; NUMERICAL ANALYSIS; PLASMA DENSITY; PRESSURE EFFECTS; RELAXATION PROCESSES;

BOLTZMANN EQUATION; ELECTRON KINETICS;

INDUCTIVELY COUPLED PLASMA;

EID: 0037198338     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(02)00028-4     Document Type: Article

References (57)

1. Electron energy distributions in stationary discharges
2. Energy distribution of electrons in a weakly ionized current-carrying plasma with a transverse inhomogeneity
3. Electron kinetics in non-uniform glow discharge plasmas
4. On simplifying approaches to the solution of the Boltzmann equation in spatially inhomogeneous plasmas
5. Non-local electron kinetics in collisional gas discharge plasma
6. Energy distribution of electrons in high-frequency gas discharges
7. Velocity distributions of elastically colliding electrons
8. Numerical solution of the spatially inhomogeneous Boltzmann equation and verification of the nonlocal approach
9. Comparison of nonlocal calculations and Monte Carlo simulations of the electron distribution function in a positive column
10. Der einfluß der elektronenreemission auf die anlaufkennlinie einer langmuir-sonde
11. Paradoxical spatial distribution of the electron temperature in a low pressure rf discharge
12. Experimental evidence on the nonlocality of the electron distribution function
13. On the spatial variation of the electron distribution function in a rf inductively coupled plasma: Experimental and theoretical study
14. Nonlocal electron kinetics in a low-pressure inductively coupled radio-frequency discharge
15. Experimental investigation and fast two-dimensional self-consistent modelling of a low pressure inductively coupled rf discharge
16. Electron distribution function in a low-pressure inductively coupled plasma
17. Modeling of nonlocal electron kinetics in low pressure inductively coupled plasma
18. Negative power absorption in inductively coupled plasma
19. Electron kinetic and electrodynamic characteristics of ICP in stochastic heating regime
20. Anomalous skin effect and collisionless power dissipation in inductively coupled discharges
21. Stochastic electron heating in bounded ratio-frequency plasmas
22. Electron kinetics and non-joule heating in near-collisionless inductively coupled plasmas
23. Model for noncollisional heating in inductively coupled plasma processing sources
24. Effect of collisionless heating on electron energy distribution in an inductively coupled plasma
25. Experimental evidence of collisionless power absorption in inductively coupled plasmas
26. Effects of collisions and particle trapping on collisionless heating
27. Self-consistent kinetic modeling of low-pressure inductively coupled radio-frequency discharges
28. Self-consistent kinetic simulation of plasmas
29. Measurements of electron energy distributions in low-pressure rf discharges
30. Experimental setup and electrical characteristics of an inductively coupled plasma
31. Two-dimensional mapping of electron distribution functions in low pressure ICP
32. A new smoothing method for obtaining the electron energy distribution function is plasmas by the numerical differentiation of the I-V characteristic
33. Radially dependent solutions of Botzmann's equation in low-temperature plasmas using a modified two-term expansion
34. Radially inhomogeneous electron kinetics in the dc column plasma
35. Energy-resolved electron particle and energy fluxes in positive column plasmas
36. Formation mechanism of the radial electron fluxes in a positive column
37. Experimental observation of a "convective cell" in electron phase space in an inductively coupled radio-frequency plasma
38. Kinetic two-dimensional modeling of inductively coupled plasmas based on a hybrid kinetic approach
39. Effect of electrons produced by ionization on calculated electron-energy distributions
40. Time-modulated electron cyclotron resonance plasma discharge for controlling generation of reactive species
41. Pulse-time modulated plasma discharge for highly selective, highly anisotropic and charge free etching
42. Modulated discharges: Effect on plasma parameters and deposition
43. Time-resolved measurements of highly polymerized negative ions in radio frequency silane plasma deposition experiments
44. Measurements of pulsed-power modulated argon plasma in an inductively coupled plasma source
45. Properties of an afterglow helium plasma
46. Fluid simulation of pulsed-power inductively coupled argon plasma
47. Global models of pulse-power-modulated high-density, low-pressure discharge
48. Simulation of pulsed electropositive and electronegative plasma
49. Studies of plasma breakdown and decay in a capacitive radiofrequency argon discharge
50. Modeling of nonlocal electron kinetics in a low-pressure afterglow plasma
51. Electron distribution function cutoff mechanism in low-pressure afterglow plasma
52. The temporal decay of the diffusion-determined afterglow plasma of the positive column
53. Diffusive cooling of electrons in ionized gases
54. Position- and time-dependent diffusion modes for electrons in gases
55. Experimental observations of the diffusion cooling of electrons in argon
56. Diffusion cooling in a magnetic field
57. Spatially averaged (global) model of time modulated high density argon plasmas