SCOPUS 정보 검색 플랫폼

Volumn 7, Issue 2-5, 1998, Pages 407-411

Si-C-N nanometric powder produced in square-wave modulated RF glow discharges

Author keywords

Nanopowder; Plasma CVD; RF glow discharge; SiCN

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; ELECTRIC DISCHARGES; NITROGEN; PLASMAS; POWDERS; SILICON COMPOUNDS;

RF GLOW DISCHARGES;

NANOSTRUCTURED MATERIALS;

EID: 0031994424 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/s0925-9635(97)00229-x Document Type: Article

Times cited : (20)

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