Physical properties of room temperature deposited B-C-N-O films prepared by dual-ion-beam deposition

Surface and Coatings Technology

Volumn 115, Issue 2-3, 1999, Pages 145-152

  Ong, Chung Wo ^a   Chan, Kai Fung ^a   Zhao, Xin An ^a   Choy, Chung Loong ^a  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

Author keywords

B C N O films; Ion beam deposition; Mechanical properties

Indexed keywords

COMPOSITION EFFECTS; DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; ENERGY GAP; GRAPHITE; HARDNESS; ION BEAMS; MECHANICAL PROPERTIES; TRANSPARENCY; VOLUME FRACTION;

ION BEAM DEPOSITION;

OPTICAL COATINGS;

EID: 0032627079     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00167-X     Document Type: Article

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