Dual ion beam deposited boron-rich boron nitride films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 2944-2949

  Chan, K F ^a   Ong, C W ^a   Choy, C L ^a   Kwok, R W M ^b  

^a HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^b CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033456549     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581965     Document Type: Article

References (22)

1. R. Riedel, Adv. Mater. 6, 549 (1994).
2. T. Lundström and Y. G. Andreev, Mater. Sci. Eng., A 209, 16 (1996).
3. D. M. Teter, MRS Bull. 23, 22 (1998).
4. T. L. Aselage and R. G. Tissot, J. Am. Ceram. Soc. 75, 2207 (1992).
5. H. Saitoh, K. Yoshida, and W. A. Yarbrough, J. Mater. Res. 8, 8 (1993).
6. H. Hubert, L. A. J. Garvie, B. Devouard, P. R. Buseck, W. T. Petuskey, and P. F. McMillan, Chem. Mater. 10, 1530 (1998).
7. X.-A. Zhao, C. W. Ong, K. F. Chan, Y. M. Ng, Y. C. Tsang, C. L. Choy, and P. W. Chan, J. Vac. Sci. Technol. A 15, 2297 (1997).
8. D. A. Shirley, Phys. Rev. B 5, 4709 (1972).
9. J. P. Rivière, D. Texier, J. Delafond, M. Jaouen, E. L. Mathé, and J. Chaumont, Mater. Lett. 22, 115 (1995).
10. A. Hoffman, I. Gouzman, and R. Brener, Appl. Phys. Lett. 64, 845 (1994).
11. P. Hammer, M. A. Baker, C. Lenardi, and W. Gissler, Thin Solid Films 290, 107 (1996).
12. O. A. Golikova, M. Zhubanov, and D. N. Mirlin, Sov. Phys. Solid State 11, 1341 (1969).
13. C. W. Ong, K. P. Chik, and H. K. Wong, J. Non-Cryst. Solids 114, 783 (1989).
14. W. Dworschak, K. Jung, and H. Ehrhardt, Thin Solid Films 254, 65 (1995).
15. P. B. Mirkarimi, K. F. McCarty, D. L. Medlin, W. G. Wolfer, T. A. Friedmann, E. J. Klaus, G. F. Cardinale, and D. G. Howitt, J. Mater. Res. 9, 2925 (1994).
16. J. F. Moulder, W. F. Stickle, P. E. Sobol, and K. D. Bomben, Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer, Eden Prairie, 1992), p. 215.
17. B. Rother, C. Weissmantel, and G. Leonhardt, Phys. Status Solidi A 100, 553 (1987).
18. B. Rother, C. Weissmantel, and G. Leonhardt, Phys. Status Solidi A 100, 553 (1987).
19. M. Okamoto, Y. Utsumi, and Y. Osaka, Jpn. J. Appl. Phys., Part 2 29, L1004 (1990).
20. M. O. Watanabe, S. Itoh, and K. Mizushima, Appl. Phys. Lett. 68, 2962 (1996).
21. V. I. Nefedov, D. Gati, B. F. Dzhurinskii, N. P. Sergushin, and Y. V. Salyn, Zh. Neorg. Khim. 20, 2307 (1975).
22. C. Doughty, S. M. Gorbatkin, T. Y. Tsui, G. M. Pharr, and D. L. Medlin, J. Vac. Sci. Technol. A 15, 2623 (1997).