Narrow features in metals at the interfaces between different etch resists

Applied Physics Letters

Volumn 83, Issue 11, 2003, Pages 2259-2261

  Sundar, Vikram C ^a   Aizenberg, Joanna ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CYANIDES; ELECTRIC RESISTANCE; ETCHING; FABRICATION; GOLD; INTERFACES (MATERIALS); SELF ASSEMBLY; SULFUR COMPOUNDS;

PHOTORESIST LAYERS;

NANOSTRUCTURED MATERIALS;

EID: 0142121573     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1611640     Document Type: Article

References (17)

1. Y. N. Xia, J. A. Rogers, K. E. Paul, and G. M. Whitesides, Chem. Rev. (Washington, D.C.) 99, 1823 (1999).
2. H. Rohrer, Microelectron. Eng. 42, 31 (1998).
3. M. F. Doerner and R. L. White, MRS Bull. 21, 28 (1996).
4. J. M. Gibson, Phys. Today 50, 56 (1997).
5. R. D. Piner, J. Zhu, F. Xu, S. H. Hong, and C. A. Mirkin, Science 283, 661 (1999).
6. S. Y. Chou, C. Keimel, and J. Gu, Nature (London) 417, 835 (2002).
7. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, Science 272, 85 (1996).
8. Y. N. Xia and G. M. Whitesides, Angew. Chem., Int. Ed. Engl. 37, 550 (1998).
9. Y. N. Xia and G. M. Whitesides, Annu. Rev. Mater. Sci. 28, 153 (1998).
10. H. A. Biebuyck, N. B. Larsen, E. Delamarche, and B. Michel, IBM J. Res. Dev. 41, 159 (1997).
11. M. Geissler, H. Schmid, A. Bietsch, B. Michel, and E. Delamarche, Langmuir 18, 2374 (2002).
12. P. E. Laibinis, G. M. Whitesides, D. L. Allara, Y. T. Tao, A. N. Parik, and R. G. Nuzzo, J. Am. Chem. Soc. 113, 7152 (1991).
13. J. Aizenberg, A. J. Black, and G. M. Whitesides, Nature (London) 394, 868 (1998).
14. A. J. Black, K. E. Paul, J. Aizenberg, and G. M. Whitesides, J. Am. Chem. Soc. 121, 8356 (1999).
15. J. C. Love, K. E. Paul, and G. M. Whitesides, Adv. Mater. (Weinheim, Ger.) 13, 60 (2001).
16. J. C. Love, D. B. Wolfe, R. Haasch, M. L. Chabinyc, K. E. Paul, G. M. Whitesides, and R. G. Nuzzo, J. Am. Chem. Soc. 125, 2597 (2003).
17. A. Carvalbo, M. Geissler, H. Schmid, B. Michel, and E. Delamarche, Langmuir 18, 2406 (2002).