Thin film cracking modulated by underlayer creep

Experimental Mechanics

Volumn 43, Issue 3, 2003, Pages 269-279

  Liang, J ^a   Huang, R ^a   Prevost J H ^a   Suo, Z ^a  

^a Princeton University   (United States)

Author keywords

Crack; Creep; Ratcheting; Thin film

Indexed keywords

CRACK INITIATION; FINITE ELEMENT METHOD; FRACTURE TOUGHNESS; PLASTIC DEFORMATION; TENSILE STRESS;

INELASTIC DEFORMATION;

THIN FILMS;

CRACK PROPAGATION; CREEP; MICROELECTROMECHANICAL SYSTEM; NANOSTRUCTURE; TENSILE STRESS;

EID: 0141940242     PISSN: 00144851     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02410525     Document Type: Article

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