On-chip testing of mechanical properties of MEMS devices

MRS Bulletin

Volumn 26, Issue 4, 2001, Pages 300-301

  Kahn, H ^a   Heuer, A M ^a   Ballarini, R ^a  

^a NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0040970689     PISSN: 08837694     EISSN: None     Source Type: Journal    
DOI: 10.1557/mrs2001.64     Document Type: Article

References (9)

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4. C.P. Chen and M.H. Leipold, Am. Ceram. Soc. Bull. 59 (1980) p. 469; C. St. John, Philos. Mag. 32(1975) p. 1193.
5. C.P. Chen, M.H. Leipold, and D. Helmreich, J. Am. Ceram. Soc. 65 (1982) p. C-49.
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7. R. Ballarini, H. Kahn, N. Tayebi, and A.H. Heuer, in ASTM STP 1413: Mechanical Properties of Structural Films (2001) in press; H. Kahn, N. Tayebi, R. Ballarini, R.L. Mullen, and A.H. Heuer, in Materials Science of Microelectromechanical Systems (MEMS) Devices II, edited by M.P. de Boer, A.H. Heuer, S.J. Jacobs, and E. Peeters (Mater. Res. Soc. Symp. Proc. 605, Warrendale, PA, 2000) p. 25.
8. R. Ballarini, H. Kahn, N. Tayebi, and A.H. Heuer, in ASTM STP 1413: Mechanical Properties of Structural Films (2001) in press; H. Kahn, N. Tayebi, R. Ballarini, R.L. Mullen, and A.H. Heuer, in Materials Science of Microelectromechanical Systems (MEMS) Devices II, edited by M.P. de Boer, A.H. Heuer, S.J. Jacobs, and E. Peeters (Mater. Res. Soc. Symp. Proc. 605, Warrendale, PA, 2000) p. 25.
9. H. Kahn, R. Ballarini, R.L. Mullen, and A.H. Heuer, Proc. R. Soc. London, Sci: A 455 (1999) p. 3807.