Fabrication of three-dimensional inductor coil using excimer laser micromachining

Journal of Micromechanics and Microengineering

Volumn 13, Issue 5, 2003, Pages 782-789

  Jolic, K I ^a   Ghantasala, M K ^a   Hayes, J P ^a   Jin, H ^a  

^a SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC INDUCTORS; EXCIMER LASERS; FABRICATION; LASER ABLATION; LASER APPLICATIONS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL MICROSCOPY; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL;

LASER MICROMACHINING; SEED LAYER DEPOSITION;

ELECTRIC COILS;

EID: 0141461817     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/5/334     Document Type: Article

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