Novel and high-yield fabrication of electroplated 3D micro-coils for MEMS and microelectronics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3511, Issue , 1998, Pages 233-240

  Yoon, Jun Bo ^a   Han, Chul Hi ^a   Yoon, Euisik ^a   Kim, Choong Ki ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

3D photolithography; Integrated inductor; Micro coil; Micromachining; Multi Exposure and single development (MESD); Solenoid

Indexed keywords

ELECTRIC INDUCTORS; ELECTROPLATING; INTEGRATED CIRCUITS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PHOTORESISTS; SEMICONDUCTOR DEVICE MANUFACTURE; SOLENOIDS; TEMPERATURE;

INTEGRATED INDUCTOR; MICROCOILS; MULTIEXPOSURE AND SINGLE DEVELOPMENT METHOD;

MICROELECTRONIC PROCESSING;

EID: 0005066059     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.324306     Document Type: Conference Paper

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