Laser-LIGA for Ni microcantilevers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4935, Issue , 2002, Pages 263-271

  Jin, Hengyi ^b   Harvey, Erol C ^b   Hayes, Jason P ^b   Ghantasala, Muralidhar K ^b   Fu, Yao ^b   Jolic, Karlo ^b   Solomon, Matthew ^b   Graves, Kynan ^a  

^a SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

^b NONE

Author keywords

Copper sacrificial layer; Electrothermal; Laser LIGA; Nickel microcantilevers; Printed circuit board

Indexed keywords

AMMONIUM COMPOUNDS; COMPUTER SIMULATION; COPPER; ELECTROFORMING; EXCIMER LASERS; MATHEMATICAL MODELS; MICROMACHINING; NICKEL; PRINTED CIRCUIT BOARDS;

MICROCANTILEVERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0037964369     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.476113     Document Type: Conference Paper

References (13)

1. Comtois, J. H. and - Bright, V. M., - Applications for surface-micromachined polysilicon thermal actuators and arrays - Sensors & Actuators A-Physical, vol. 58, no. 1, pp. 19-25, Jan, 1997.
2. Kolesar, E. S., - Allen, P. B., - Howard, J. T., - Wilken, J. M., and - Boydston, N., - Thermally-actuated cantilever beam for achieving large in-plane mechanical deflections - Thin Solid Films. Vol. 355, pp. 295-302. 1999.
3. Syms, R. R. A., - Long-travel electrothermally driven resonant cantilever microactuators - Journal of Micromechanics & Microengineering, vol. 12, no. 3, pp. 211-218, May, 2002.
4. Jonsmann, J., - Sigmund, O., and - Bouwstra, S., - Compliant electro-thermal microactuators - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, Piscataway, NJ, USA., pp. 588-593.1999.
5. Sigmund, O., - Design of multiphysics actuators using topology optimization - part I: one-material structures - Computer Methods in Applied Mechanics & Engineering, vol. 190, no. 49-50, pp. 6577-6604, Oct 12, 2001.
6. Yin, L. and - Ananthasuresh, G. K., - A novel topology design scheme for the multi-physics problems of electro-thermally actuated compliant micromechanisms - Sensors and Actuators, A: Physical. Vol. 97-98, pp. 599-609. Apr 1, 2002.
7. Mankame, N. D. and - Ananthasuresh, G. K., - Comprehensive thermal modelling and characterization of an electro-thermal-compliant microactuator - Journal of Micromechanics & Microengineering, Vol. 11, No. 5, pp. 452-462, Sept, 2001.
8. Moulton, T. and - Ananthasuresh, G. K., - Micromechanical devices with embedded electro-thermal-compliant actuation - Sensors & Actuators A-Physical, vol. 90, No. 1-2, pp. 38-48, May 1, 2001.
9. Li, J. and - Ananthasuresh, G. K., - Quality study on the excimer laser micromachining of electro-thermal-compliant micro devices - Journal of Micromechanics & Microengineering, vol. 11, no. 1, pp. 38-47, Jan, 2001.
10. Arnold, J., Dasbach, U., Ehrfeld, W., Hesch, K., and Loewe, H., Combination of excimer laser micromachining and replication processes suited for large scale production, Applied Surface Science, vol. 86, no. 1, pp. 251-258, 1995.
11. Holmes, A. S., Saidam, S. M., and Lawes, R. A., "Low cost LIGA processes," IEE Colloquium (Digest): Proceedings of the 1997 IEE Colloquium on Microengineering Technologies and How To Exploit Them, London. UK, 1997.
12. Jin, H., Harvey, E. C., Hayes, J. P., Ghantasala, M. K., Dowling, A., Solomon, M., and Davies, S. T., Laser-LIGA for Serpentine Ni Microstructures, Proceedings of SPIE, vol. 4592, pp. 166-171. 2001.
13. Jonsmann, J., Bouwstra, S., Thermal microactuator characterisation, Proceeding of SPIE, Design, Test, and Microfabrication of MEMS and MOEMS, Vol. 3680, pp. 1046-1055. 1999.