Low cost LIGA processes

IEE Colloquium (Digest)

Volumn , Issue 76, 1997, Pages

  Holmes, A S ^a   Saidam, S M ^a   Lawes, R A ^a  

^a IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; COST EFFECTIVENESS; ELECTRODEPOSITION; ELECTROFORMING; EXCIMER LASERS; FRANCIS TURBINES; LASER ABLATION; METALLOGRAPHIC MICROSTRUCTURE; MICROMACHINING; NICKEL; PHOTORESISTS;

CONTACT LITHOGRAPHY; MICROTURBINES; SEED LAYER DEPOSITION;

MICROELECTRONIC PROCESSING;

EID: 0031559216     PISSN: 09633308     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)