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Volumn 3223, Issue , 1997, Pages 26-33
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Fabrication techniques and their application to produce novel micromachined structures and devices using excimer laser projection
a
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Author keywords
Excimer lasers; Laser LIGA; Micromachining
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Indexed keywords
ABLATION;
ASPECT RATIO;
COMPOSITE MICROMECHANICS;
CONCURRENT ENGINEERING;
EXCIMER LASERS;
GAS LASERS;
JOB ANALYSIS;
LAMINATING;
LASER ABLATION;
MACHINING;
METHANE;
MICROANALYSIS;
MICROFABRICATION;
MICROMACHINING;
OXIDE MINERALS;
PHOTORESISTS;
QUARTZ;
RADIATION DETECTORS;
RAPID PROTOTYPING;
SCANNING;
THREE DIMENSIONAL;
3D MICROMACHINING;
APPROPRIATE PATTERNS;
EXCIMER;
FABRICATION TECHNIQUES;
HIGH ASPECT RATIOS;
HIGH RESOLUTIONS;
IMAGE PROJECTIONS;
LASER FIRINGS;
LASER PROJECTIONS;
MICROMACHINED STRUCTURES;
MICRON RESOLUTIONS;
NEW TECHNIQUES;
OPTICAL-;
REFLECTING STRUCTURES;
REPEATING PATTERNS;
WORK PIECES;
LASERS;
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EID: 57649216209
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.284497 Document Type: Conference Paper |
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Times cited : (42)
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References (5)
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