Photoluminescence enhancement by inductively coupled argon plasma exposure for quantum-well intermixing

Applied Physics Letters

Volumn 83, Issue 1, 2003, Pages 60-62

  Djie, H S ^a   Mei, T ^a   Arokiaraj, J ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; INDUCTIVELY COUPLED PLASMA; INTEGRATED CIRCUITS; PHOTOLUMINESCENCE;

OPTOELECTRONIC INTEGRATED CIRCUITS;

SEMICONDUCTOR QUANTUM WELLS;

EID: 0042842382     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1591063     Document Type: Article

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