Role of atomic hydrogen in argon plasma-assisted epitaxy of InGaAsP/InP

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 5, 1997, Pages 1707-1714

  LaPierre, R R ^a   Robinson, B J ^a   Thompson, D A ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0041855858     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589359     Document Type: Article

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