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Volumn 41, Issue 8 A, 2002, Pages
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High-density plasma enhanced quantum well intermixing in InGaAs/InGaAsP structure using argon plasma
a a a a |
Author keywords
Argon plasma; Inductively coupled plasma; Photoluminescence; Quantum well; Quantum well intermixing
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Indexed keywords
ARGON;
CRYSTALLINE MATERIALS;
ENERGY GAP;
INDUCTIVELY COUPLED PLASMA;
PHOTOLUMINESCENCE;
PLASMA DENSITY;
SEMICONDUCTING INDIUM COMPOUNDS;
SEMICONDUCTOR DEVICE STRUCTURES;
SEMICONDUCTOR LASERS;
TUNING;
QUANTUM WELL INTERMIXING;
SEMICONDUCTOR QUANTUM WELLS;
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EID: 0036695777
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.41.l867 Document Type: Article |
Times cited : (21)
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References (11)
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