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Volumn 41, Issue 8 A, 2002, Pages

High-density plasma enhanced quantum well intermixing in InGaAs/InGaAsP structure using argon plasma

Author keywords

Argon plasma; Inductively coupled plasma; Photoluminescence; Quantum well; Quantum well intermixing

Indexed keywords

ARGON; CRYSTALLINE MATERIALS; ENERGY GAP; INDUCTIVELY COUPLED PLASMA; PHOTOLUMINESCENCE; PLASMA DENSITY; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR LASERS; TUNING;

EID: 0036695777     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.l867     Document Type: Article
Times cited : (21)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.