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Volumn , Issue , 2002, Pages 319-322

A new quantum well intermixing technique using inductively-coupled argon plasma on InGaAs/InGaAsP laser structures

Author keywords

Inductively coupled plasma; InGaAs InGaAsP system; Plasma technique; Quantum well intermixing

Indexed keywords

ANNEALING; ARGON; INDUCTIVELY COUPLED PLASMA; REACTIVE ION ETCHING; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE;

EID: 0036047945     PISSN: 10928669     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (8)

References (5)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.