|
Volumn , Issue , 2002, Pages 319-322
|
A new quantum well intermixing technique using inductively-coupled argon plasma on InGaAs/InGaAsP laser structures
a
|
Author keywords
Inductively coupled plasma; InGaAs InGaAsP system; Plasma technique; Quantum well intermixing
|
Indexed keywords
ANNEALING;
ARGON;
INDUCTIVELY COUPLED PLASMA;
REACTIVE ION ETCHING;
SEMICONDUCTING INDIUM GALLIUM ARSENIDE;
SEMICONDUCTING INDIUM PHOSPHIDE;
QUANTUM WELL INTERMIXING;
QUANTUM WELL LASERS;
|
EID: 0036047945
PISSN: 10928669
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (8)
|
References (5)
|