메뉴 건너뛰기




Volumn 79, Issue 3, 2003, Pages 369-390

Single-material TiO2 double-layer antireflection coatings

Author keywords

Antireflection coating; DLAR; Double layer; Spectroscopic ellipsometry; Titanium dioxide

Indexed keywords

CURRENT DENSITY; LIGHT REFLECTION; REFRACTIVE INDEX; SILICON SOLAR CELLS; TITANIUM DIOXIDE;

EID: 0042512270     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0927-0248(02)00473-7     Document Type: Article
Times cited : (236)

References (59)
  • 1
    • 0022758573 scopus 로고
    • Antireflection coatings for planar silicon solar cells
    • Jellison G.E., Wood R.F. Antireflection coatings for planar silicon solar cells. Solar Cells. 18:1986;93-114.
    • (1986) Solar Cells , vol.18 , pp. 93-114
    • Jellison, G.E.1    Wood, R.F.2
  • 2
    • 0026204650 scopus 로고
    • Optimized antireflection coatings for high-efficiency silicon solar cells
    • Zhao J., Green M.A. Optimized antireflection coatings for high-efficiency silicon solar cells. IEEE Trans. Electron Dev. 38(8):1991;1925-1934.
    • (1991) IEEE Trans. Electron Dev. , vol.38 , Issue.8 , pp. 1925-1934
    • Zhao, J.1    Green, M.A.2
  • 4
    • 0020686937 scopus 로고
    • Plasma-enhanced CVD silicon nitride antireflection coatings for solar cells
    • Johnson C.C., Wydeven T., Donohoe K. Plasma-enhanced CVD silicon nitride antireflection coatings for solar cells. Solar Energy. 31(4):1983;355-358.
    • (1983) Solar Energy , vol.31 , Issue.4 , pp. 355-358
    • Johnson, C.C.1    Wydeven, T.2    Donohoe, K.3
  • 5
    • 0031249442 scopus 로고    scopus 로고
    • Characterization and optimization of absorbing plasma-enhanced chemical vapor deposited antireflection coatings for silicon photovoltaics
    • Doshi P., Jellison G.E., Rohatgi A. Characterization and optimization of absorbing plasma-enhanced chemical vapor deposited antireflection coatings for silicon photovoltaics. Appl. Opt. 36(30):1997;7826-7837.
    • (1997) Appl. Opt. , vol.36 , Issue.30 , pp. 7826-7837
    • Doshi, P.1    Jellison, G.E.2    Rohatgi, A.3
  • 6
    • 0001239998 scopus 로고    scopus 로고
    • Application of plasma enhanced chemical vapor deposition silicon nitride as a double layer antireflection coating and passivation layer for polysilicon solar cells
    • Winderbaum S., Yun F., Reinhold O. Application of plasma enhanced chemical vapor deposition silicon nitride as a double layer antireflection coating and passivation layer for polysilicon solar cells. J. Vac. Sci. Technol. A. 15(3):1997;1020-1025.
    • (1997) J. Vac. Sci. Technol. A , vol.15 , Issue.3 , pp. 1020-1025
    • Winderbaum, S.1    Yun, F.2    Reinhold, O.3
  • 7
    • 0022150977 scopus 로고
    • Sol-gel double-layer antireflection coatings for silicon solar cells
    • Pettit R.B., Brinker C.J., Ashley C.S. Sol-gel double-layer antireflection coatings for silicon solar cells. Solar Cells. 15:1985;267-278.
    • (1985) Solar Cells , vol.15 , pp. 267-278
    • Pettit, R.B.1    Brinker, C.J.2    Ashley, C.S.3
  • 8
    • 0030402466 scopus 로고    scopus 로고
    • Cost impacts of anti-reflection coatings on silicon solar cells
    • Wong D.C., Waugh A. Cost impacts of anti-reflection coatings on silicon solar cells. Mater. Res. Symp. Proc. 426:1996;503-511.
    • (1996) Mater. Res. Symp. Proc. , vol.426 , pp. 503-511
    • Wong, D.C.1    Waugh, A.2
  • 10
    • 0019026635 scopus 로고
    • Titanium dioxide antireflection coating for silicon solar cells by spray deposition
    • Kern W., Tracy E. Titanium dioxide antireflection coating for silicon solar cells by spray deposition. RCA Rev. 41:1980;133-180.
    • (1980) RCA Rev. , vol.41 , pp. 133-180
    • Kern, W.1    Tracy, E.2
  • 15
    • 0002131489 scopus 로고
    • Oxide layers deposited from organic solutions
    • Schröder H. Oxide layers deposited from organic solutions. Phys. Thin Films. 5:1969;87-141.
    • (1969) Phys. Thin Films , vol.5 , pp. 87-141
    • Schröder, H.1
  • 17
    • 0017503524 scopus 로고
    • Preparation of glasses and ceramics from metal-organic compounds
    • Yoldas B.E. Preparation of glasses and ceramics from metal-organic compounds. J. Materials Science. 12:1977;1203-1208.
    • (1977) J. Materials Science , vol.12 , pp. 1203-1208
    • Yoldas, B.E.1
  • 18
    • 0032682430 scopus 로고    scopus 로고
    • Enhancing effect of iron chlorides on the anatase-rutile transition in titanium dioxide
    • Gennari F.C., Pasquevich D.M. Enhancing effect of iron chlorides on the anatase-rutile transition in titanium dioxide. J. Am. Ceram. Soc. 82(7):1999;1915-1921.
    • (1999) J. Am. Ceram. Soc. , vol.82 , Issue.7 , pp. 1915-1921
    • Gennari, F.C.1    Pasquevich, D.M.2
  • 19
    • 35949035159 scopus 로고
    • Investigation of effective medium models of microscopic surface roughness by spectroscopic ellipsometry
    • Aspnes D.E., Theeten J.B. Investigation of effective medium models of microscopic surface roughness by spectroscopic ellipsometry. Phys. Rev. B. 20:1979;3292-3302.
    • (1979) Phys. Rev. B , vol.20 , pp. 3292-3302
    • Aspnes, D.E.1    Theeten, J.B.2
  • 22
    • 0000550480 scopus 로고
    • Preparation, properties and optical applications of thin films of titanium dioxide
    • Hass G. Preparation, properties and optical applications of thin films of titanium dioxide. Vacuum. II(4):1952;331-345.
    • (1952) Vacuum , vol.2 , Issue.4 , pp. 331-345
    • Hass, G.1
  • 23
    • 84940881269 scopus 로고
    • 2) rutile
    • E. Palik (Ed.), Academic Press Inc., Orlando
    • 2) rutile, in: E. Palik (Ed.), Handbook of Optical Constants, Vol. 1, Academic Press Inc., Orlando, 1985, pp. 795-804.
    • (1985) Handbook of Optical Constants , vol.1 , pp. 795-804
    • Ribarsky, M.W.1
  • 24
    • 0002633302 scopus 로고
    • Calculation of optical constants, n and k, in the interband region
    • E.D. Palik (Ed.), Toronto, Academic Press, New York
    • A.R. Forouhi, I. Bloomer, Calculation of optical constants, n and k, in the interband region, in: E.D. Palik (Ed.), Handbook of Optical Constants of Solids, Vol. II, Toronto, 1991, Academic Press, New York, pp. 151-175.
    • (1991) Handbook of Optical Constants of Solids , vol.2 , pp. 151-175
    • Forouhi, A.R.1    Bloomer, I.2
  • 25
    • 0025420596 scopus 로고
    • Characterization of antireflection films for surface-passivated crystalline silicon solar cells using spectroscopic ellipsometry
    • IEEE, New York
    • O. Kamataki, S. Iida, T. Saitoh, T. Uematsu, Characterization of antireflection films for surface-passivated crystalline silicon solar cells using spectroscopic ellipsometry, in: 21st IEEE Photovoltaic Specialists Conference, IEEE, New York, 1990, pp. 363-367.
    • (1990) 21st IEEE Photovoltaic Specialists Conference , pp. 363-367
    • Kamataki, O.1    Iida, S.2    Saitoh, T.3    Uematsu, T.4
  • 26
    • 0343095910 scopus 로고    scopus 로고
    • Determination of micro-structure related optical constants of titanium dioxide thin films using optical methods
    • Kim S.Y., Kim H.J., Cho H.M., Lee Y.W. Determination of micro-structure related optical constants of titanium dioxide thin films using optical methods. Proc. SPIE. 2873:1996;234-237.
    • (1996) Proc. SPIE , vol.2873 , pp. 234-237
    • Kim, S.Y.1    Kim, H.J.2    Cho, H.M.3    Lee, Y.W.4
  • 27
    • 0001289091 scopus 로고    scopus 로고
    • Simultaneous determination of refractive index, extinction coefficient, and void distribution of titanium dioxide thin film by optical methods
    • Kim S.Y. Simultaneous determination of refractive index, extinction coefficient, and void distribution of titanium dioxide thin film by optical methods. Appl. Opt. 35(34):1996;6703-6707.
    • (1996) Appl. Opt. , vol.35 , Issue.34 , pp. 6703-6707
    • Kim, S.Y.1
  • 29
    • 0033284287 scopus 로고    scopus 로고
    • 2 thin films based on variable-angle spectroscopic ellipsometry measurements
    • 2 thin films based on variable-angle spectroscopic ellipsometry measurements Mater. Sci. Eng. B. 68:1999;42-47.
    • (1999) Mater. Sci. Eng. B , vol.68 , pp. 42-47
    • Mardare, D.1    Hones, P.2
  • 31
    • 84975624060 scopus 로고
    • Estimate of the degree of inhomogeneity of the refractive index of dielectric films from spectroscopic ellipsometry
    • de Lariviére G.P., Frigerio J.M., Rivory J., Abelés F. Estimate of the degree of inhomogeneity of the refractive index of dielectric films from spectroscopic ellipsometry. Appl. Opt. 31(28):1992;6056-6061.
    • (1992) Appl. Opt. , vol.31 , Issue.28 , pp. 6056-6061
    • De Lariviére, G.P.1    Frigerio, J.M.2    Rivory, J.3    Abelés, F.4
  • 34
    • 0004359338 scopus 로고    scopus 로고
    • Annealing effect on ion-beam-sputtered titanium dioxide film
    • Wang W.-H., Chao S. Annealing effect on ion-beam-sputtered titanium dioxide film. Opt. Lett. 23(18):1998;1417-1419.
    • (1998) Opt. Lett. , vol.23 , Issue.18 , pp. 1417-1419
    • Wang, W.-H.1    Chao, S.2
  • 35
    • 84975424459 scopus 로고
    • 2 antireflection coatings by a low temperature spray process
    • 2 antireflection coatings by a low temperature spray process J. Electrochem. Soc. 125(6):1978;983-985.
    • (1978) J. Electrochem. Soc. , vol.125 , Issue.6 , pp. 983-985
    • Hovel, H.J.1
  • 37
    • 0033204596 scopus 로고    scopus 로고
    • Crystallization and microstructure development of sol-gel-derived titanium dioxide thin films with single and multiple layers
    • Ohya Y., Mishina J., Matsude T., Ban T., Takahashi Y. Crystallization and microstructure development of sol-gel-derived titanium dioxide thin films with single and multiple layers. J. Am. Ceram. Soc. 82(10):1999;2601-2606.
    • (1999) J. Am. Ceram. Soc. , vol.82 , Issue.10 , pp. 2601-2606
    • Ohya, Y.1    Mishina, J.2    Matsude, T.3    Ban, T.4    Takahashi, Y.5
  • 39
    • 0034140213 scopus 로고    scopus 로고
    • Deposition and modification of titanium dioxide thin films by filtered arc deposition
    • Bendavid A., Martin P.J., Takikawa H. Deposition and modification of titanium dioxide thin films by filtered arc deposition. Thin Solid Films. 360:2000;241-249.
    • (2000) Thin Solid Films , vol.360 , pp. 241-249
    • Bendavid, A.1    Martin, P.J.2    Takikawa, H.3
  • 45
    • 0022088792 scopus 로고
    • Formation of broad band antireflective coatings on fused silica for high power laser applications
    • Yoldas B.E., Partlow D.P. Formation of broad band antireflective coatings on fused silica for high power laser applications. Thin Solid Films. 129:1985;1-14.
    • (1985) Thin Solid Films , vol.129 , pp. 1-14
    • Yoldas, B.E.1    Partlow, D.P.2
  • 46
    • 0028459860 scopus 로고
    • Interrelationship between densification, crystallization, and chemical evolution in sol-gel titania thin films
    • Keddie J.L., Braun P.V., Giannelis E.P. Interrelationship between densification, crystallization, and chemical evolution in sol-gel titania thin films. J. Am. Ceram. Soc. 77(6):1994;1592-1596.
    • (1994) J. Am. Ceram. Soc. , vol.77 , Issue.6 , pp. 1592-1596
    • Keddie, J.L.1    Braun, P.V.2    Giannelis, E.P.3
  • 47
    • 0017241347 scopus 로고
    • 2 films produced by reactive evaporation of various titanium-oxygen phases
    • 2 films produced by reactive evaporation of various titanium-oxygen phases Appl. Opt. 15(12):1976;2986-2991.
    • (1976) Appl. Opt. , vol.15 , Issue.12 , pp. 2986-2991
    • Pulker, H.K.1    Paesold, G.2    Ritter, E.3
  • 57
    • 0032640793 scopus 로고    scopus 로고
    • Optimised antireflection coatings for planar silicon solar cells using remote PECVD silicon nitride and porous silicon dioxide
    • Nagel H., Aberle A.G., Hezel R. Optimised antireflection coatings for planar silicon solar cells using remote PECVD silicon nitride and porous silicon dioxide. Progr. Photovolt. 7:1999;245-260.
    • (1999) Progr. Photovolt. , vol.7 , pp. 245-260
    • Nagel, H.1    Aberle, A.G.2    Hezel, R.3
  • 58
    • 0031388370 scopus 로고    scopus 로고
    • PC1D version 5: 32-bit solar cell modeling on personal computers
    • IEEE, New York
    • D.A. Clugston, P.A. Basore, PC1D version 5: 32-bit solar cell modeling on personal computers, in: 26th IEEE Photovoltaics Specialists Conference, IEEE, New York, 1997, pp. 207-210.
    • (1997) 26th IEEE Photovoltaics Specialists Conference , pp. 207-210
    • Clugston, D.A.1    Basore, P.A.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.