Density of thin TiO2 films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 113, Issue 1-4, 1996, Pages 288-292

  Laube, M ^a   Rauch, F ^a   Ottermann, C ^b   Anderson, O ^b   Bange, K ^b  

^a GOETHE UNIVERSITY   (Germany)

^b SCHOTT AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY MEASUREMENT (OPTICAL); HELIUM; OPTICAL COATINGS; OPTICAL VARIABLES MEASUREMENT; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TITANIUM DIOXIDE; X RAY SPECTROSCOPY;

STOPPING POWER; THIN OXIDE FILMS; X RAY REFLECTION SPECTROMETRY;

THIN FILMS;

EID: 0030168062     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0168-583X(95)01331-8     Document Type: Article

References (25)

1. H.K. Pulker, Coatings on Glass (Elsevier, Amsterdam, 1987).
2. E.E. Khawaja, F. Bouamrane, F. Al-Adel, A.R. Hallak, M.A. Daous and M.A. Salim, Thin Solid Films 240 (1994) 121.
3. K. Nakajima, S. Aoki, S. Sudo, M. Mondo, H. Kudo, S. Fujiwara and T. Arai, Jpn. J. Appl. Phys. 32 (1993) 164.
4. D. G. Simons, C. R. Crowe and D. Brown, J. Appl. Phys. 53 (1982) 3900.
5. M. Campagna and R. Rosei, eds., Photoemission and Absorption Spectroscopy of Solids and Interfaces with Synchrotron Radiation (North-Holland, Amsterdam, 1990), p. 157.
6. B. Lengeler, Adv. X-ray Anal. 35 (1992).
7. L.R. Doolittle, Nucl. Instr. and Meth. B 9 (1985) 344.
8. M. Laube, F. Rauch, H. Niederwald, C. Ottermann and K. Bange, Glastech. Ber. 67 (1994) 87.
9. W. Wagner, F. Rauch, C. Ottermann and K. Bange, Fresenius J. Anal. Chem. 333 (1989) 478.
10. C. Ottermann, A. Temmink and K. Bange, Proc. SPIE 1272 (1990) 111.
11. Philips Analytical X-ray, Almelo, The Netherlands.
12. K. Bange, C.R. Ottermann, O. Anderson, U. Jeschkowski, M. Laube and R. Feile, Thin Solid Films 197 (1991) 279.
13. W.D. Kingery, H.K. Bowen and D.R. Uhlmann, Introduction to Ceramics (Wiley, New York, 1976).
14. R.C. Weast, CRC Handbook of Chemistry and Physics (CRC Press, Boca Raton, 1979).
15. M. Hüppauff, K. Bange and B. Lengeler, Thin Solid Films 230 (1993) 191.
16. M. Hüppauff and B. Lengeler, Fresenius J. Anal. Chem. 346 (1993) 155.
17. J.F. Ziegler and J.P. Biersack, The Stopping and Ranges of Ions in Solids (Pergamon, New York, 1985).
18. D.C. Santry and R.D. Werner, Nucl. Instr. and Meth. 178 (1980) 531.
19. G. Reiter, H. Baumgart, N. Kniest, E. Pfaff and G. Clausnitzer, Nucl. Instr. and Meth. B 27 (1987) 287.
20. J.F. Ziegler, Helium Stopping Powers and Ranges in All Elements, Vol. 4 (Pergamon, New York, 1977).
21. P. Bauer, W. Rössler and P. Mertens, Nucl. Instr. and Meth. B 69 (1992) 46.
22. G. Blondiaux, M. Valladon, K. Ishii and J.L. Debrun, Nucl. Instr. and Meth. 168 (1980) 29.
23. W. K. Chu, J. W. Mayer and M-A. Nicolet., Backscattering Spectrometry (Academic, New York/London, 1978).
24. F. Aumayer, P. Bauer and D. Semrad, Nucl. Instr. and Meth. 212 (1983) 529.
25. J.F. Ziegler, Stopping Cross-Sections for Energetic Ions in All Elements, Vol. 5 (Pergamon, New York, 1980).