Biochemical IC chips fabricated by hybrid microstereolithography

Materials Research Society Symposium - Proceedings

Volumn 758, Issue , 2003, Pages 193-204

  Ikuta, Koji ^a   Maruo, Shoji ^a   Hasegawa, Tadahiro ^a   Adachi, Takao ^a   Takahashi, Atsushi ^a   Ikeda, Kota ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCHEMISTRY; INTEGRATED CIRCUIT MANUFACTURE; LITHOGRAPHY; MULTIPHOTON PROCESSES; THREE DIMENSIONAL;

BIOCHEMICAL INTEGRATED CIRCUIT CHIPS; HYBRID MICROSTEREOLITHOGRAPHY;

INTEGRATED CIRCUITS;

EID: 0042466160     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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