Remote light-driven micromachines fabricated by 200 nm microstereolithography

Proceedings of the IEEE Conference on Nanotechnology

Volumn 2001-January, Issue , 2001, Pages 507-512

  Maruo, Shoji ^a   Ikuta, Koji ^a   Korogi, Hayato ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; FABRICATION; INFRARED DEVICES; INFRARED LASERS; LASER BEAMS; MICROMACHINING; MICROMANIPULATORS; MICROSTRUCTURE; NANOTECHNOLOGY; SURFACE MICROMACHINING; ULTRASHORT PULSES;

FABRICATION PROCESS; FOCUSED LASER BEAMS; MICROSTEREOLITHOGRAPHY; NEAR INFRA-RED LASER BEAMS; PHOTOCURABLE POLYMERS; SACRIFICIAL ETCHING; TWO-PHOTON MICROSTEREOLITHOGRAPHY; VISIBLE AND NEAR INFRARED;

PULSED LASERS;

EID: 84949189937     PISSN: 19449399     EISSN: 19449380     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2001.966475     Document Type: Conference Paper

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