Light-driven mems made by high-speed two-photon microstereolithography

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 594-597

  Maruo, S ^a   Ikuta, K ^a   Hayato, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FLUIDICS; LIGHT SENSITIVE MATERIALS; LITHOGRAPHY; MICROMACHINING; MICROMANIPULATORS; MICROSTRUCTURE; PHOTONS; ULTRASHORT PULSES;

MICROSTEREOLITHOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 0035006728     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)