Composition-dependent crystallization of alternative gate dielectrics

Applied Physics Letters

Volumn 83, Issue 7, 2003, Pages 1459-1461

  Van Dover, R B ^a   Green, M L ^b   Manchanda, L ^b   Schneemeyer, L F ^b   Siegrist, T ^c  

^a Cornell University   (United States)

^b AGERE SYSTEMS   (United States)

^c LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; GATES (TRANSISTOR); PERMITTIVITY; SILICA;

GATE DIELECTRICS;

AMORPHOUS MATERIALS;

EID: 0042418690     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1603341     Document Type: Article

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