Advanced amorphous dielectrics for embedded capacitors

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 1999, Pages 797-800

  Alers, G B ^a   van Dover, R B ^a   Schneemeyer, L F ^a   Stirling, L ^a   Sung, C Y ^a   Diodato, P W ^a   Liu, R ^a   Wong, Y H ^a   Fleming, R M ^a   Lang, D V ^a   Chang, J P ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALLOYS; AMORPHOUS MATERIALS; CAPACITORS; DIELECTRIC FILMS; DYNAMIC RANDOM ACCESS STORAGE; OXIDES; PERMITTIVITY;

EMBEDDED CAPACITORS; HIGH DIELECTRIC CONSTANT MATERIALS; MIXED METAL OXIDES; TANTALUM OXIDE;

DIELECTRIC MATERIALS;

EID: 17544399812     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)