A high frequency resonant scanner using thermal actuation

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 698-701

  Sinclair, Michael ^a  

^a MICROSOFT RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DESIGN; FREQUENCIES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; RESIDUAL STRESSES; RESONANCE; SCANNING; SUBSTRATES; THERMAL EXPANSION; TORQUE;

ACTUATOR DESIGN; HIGH FREQUENCY RESONANT SCANNER; JOULE HEATED BUCKLE BEAMS; OPTICAL SCANNER; THERMAL ACTUATION;

MIRRORS;

EID: 0036122173     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. 3D self-assembled micro-actuators for optical applications
2. A raster-scanning full-motion video display using polysilicon micromachined mirrors
3. Thermally actuated microscanner with large angle and low consumption