A novel single-layer bi-directional out-of-plane electrothermal microactuator

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 693-697

  Chen, Wen Chih ^a   Hsieh, Jerwei ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Delamination; Fatigue test; Out of plane motion; Thermal actuator

Indexed keywords

DELAMINATION; DESIGN; ELECTRIC POTENTIAL; FABRICATION; FATIGUE TESTING; MECHANICAL TESTING; THERMAL EXPANSION; THIN FILMS; VIBRATIONS (MECHANICAL);

BIDIRECTIONAL ACTUATION; ELECTROTHERMAL MICROACTUATOR; SINGLE LAYER THIN FILM MATERIAL; STATIC LOAD DEFLECTION TEST;

MICROACTUATORS;

EID: 0036118074     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. Laterally driven polysilicon resonant microstructures
2. Out-of-plane comb drive lever actuator
3. Thermal actuated optical microscanner with large angle and low consumption
4. A bistable microrelay based on two-segment multimorph cantilever actuators
5. Process for in-plane and out-of plane single-crystal-silicon thermal microactuators
6. Characterization of multi-segment organic thermal actuators
7. Thermally excited silicon microactuators
8. Applications for surface-micromachined polysilicon thermal actuators and arrays
9. Design and performance of a double hot arm polysilicon thermal actuator
10. A novel out-of-plane electrothermal microactuator