Rapid thermal processing of III-nitrides

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 797-801

  Hong, J ^a   Lee, J W ^a   Vartuli, C B ^a   Abernathy, C R ^a   MacKenzie, J D ^a   Donovan, S M ^a   Pearton, S J ^a   Zolper, J C ^b  

^a University of Florida   (United States)

^b SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0344438730     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580710     Document Type: Article

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