Room-temperature visible and infrared photoluminescence from Pr-implanted GaN films by focused-ion-beam direct write

Applied Physics Letters

Volumn 74, Issue 16, 1999, Pages 2364-2366

  Chao, L C ^a   Steckl, A J ^a  

^a University of Cincinnati   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; INFRARED SPECTROSCOPY; ION IMPLANTATION; LIGHT EMISSION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOLECULAR BEAM EPITAXY; PHOTOLUMINESCENCE; PRASEODYMIUM; SEMICONDUCTING GALLIUM COMPOUNDS;

GALLIUM NITRIDE; HYDRIDE VAPOR PHASE EPITAXY (HVPE);

SEMICONDUCTING FILMS;

EID: 0032615294     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123852     Document Type: Article

References (15)

1. R. G. Wilson, R. N. Schwartz, C. R. Abernathy, S. J. Pearton, N. Newman, M. Rubin, T. Fu, and J. M. Zavada, Appl. Phys. Lett. 65, 992 (1994).
2. C. H. Qiu, M. W. Leksono, J. I. Pankove, J. T. Torvik, R. J. Feuerstein, and F. Namavar, Appl. Phys. Lett. 66, 562 (1995).
3. S. Kim, S. J. Rhee, D. A. Turnbull, E. E. Reuter, X. Li, J. J. Coleman, and S. G. Bishop, Appl. Phys. Lett. 71, 231 (1997).
4. D. M. Hansen, R. Zhang, N. R. Perkins, S. Safvi, L. Zhang, K. L. Bray, and T. F. Kuech, Appl. Phys. Lett. 72, 1244 (1998).
5. J. D. MacKenzie, C. R. Abernathy, S. J. Pearton, U. Hömmerich, J. T. Seo, R. G. Wilson, and J. M. Zavada, Appl. Phys. Lett. 72, 2710 (1998).
6. A. J. Steckl and R. Birkhahn, Appl. Phys. Lett. 73, 1700 (1998).
7. R. Birkhahn and A. J. Steckl, Appl. Phys. Lett. 73, 2143 (1998).
8. A. J. Steckl, M. Garter, R. Birkhahn, and J. Scofield, Appl. Phys. Lett. 73, 2450 (1998).
9. M. Garter, J. Scofield, R. Birkhahn, and A. J. Steckl, Appl. Phys. Lett. 74, 182 (1999).
10. L. R. Harriott and H. Temkin, in Integrated Optoelectronics, edited by M. Dagenais, R. F. Leheny, and J. Crow (Academic, New York, 1994), Chap. 6.
11. A. J. Steckl, P. Chen, H. E. Jackson, A. G. Choo, X. Cao, J. T. Boyd, and M. Kumar, J. Vac. Sci. Technol. B 13, 2570 (1995).
12. A. J. Steckl and I. Chyr, J. Vac. Sci. Technol. B 17, 362 (1999).
13. J. P. Biersack and L. J. Haggmark, Nucl. Instrum. Methods 174, 257 (1980).
14. V. K. Tikhomirov, K. lakoubovskii, P. W. Hertogen, and G. J. Adriaenssens. Appl. Phys. Lett. 71, 2740 (1997).
15. R. Birkhahn, M. Garter, and A. J. Steckl, Appl. Phys. Lett. 74, 2161 (1999).