Nanoparticles of Si-C-N from low temperature RF plasmas: Selective size, composition and structure

Applied Surface Science

Volumn 144-145, Issue , 1999, Pages 702-707

  Viera, G ^a   Garcia Caurel E ^a   Costa, J ^b   Andujar J L ^a   Bertran, E ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

^b UNIVERSITY OF GIRONA   (Spain)

Author keywords

Nanopowder particles; Plasma chemical vapour; Si; SiCN alloys

Indexed keywords

AMORPHOUS MATERIALS; CERAMIC MATERIALS; COMPOSITION; CRYSTAL STRUCTURE; GRAIN SIZE AND SHAPE; NANOSTRUCTURED MATERIALS; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POWDERS; THIN FILMS;

NANOSTRUCTURED THIN FILMS; SELECTIVE SIZE;

SILICON ALLOYS;

EID: 0343975433     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00909-X     Document Type: Article

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