Deposition of ultrathin fluoropolymer films on Si(100) and GaAs(100) surfaces by RF magnetron sputtering of poly(tetrafluoroethylene-co-hexafluoropropylene)

Journal of Physical Chemistry B

Volumn 107, Issue 12, 2003, Pages 2780-2787

  Yang, G H ^a   Zhang, Yan ^a   Kang, E T ^a   Neoh, K G ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

PEEL ADHESION; POLYHEXAFLUOROPROPYLENE; TIME OF FLIGHT SECONDARY ION MASS SPECTROMETRY;

ADHESION; ETCHING; FLUORINE CONTAINING POLYMERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; PHOTOELECTRON SPECTROSCOPY; POLYPROPYLENES; POLYTETRAFLUOROETHYLENES; SECONDARY ION MASS SPECTROMETRY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING SILICON; THICKNESS MEASUREMENT;

ULTRATHIN FILMS;

EID: 0038394214     PISSN: 10895647     EISSN: None     Source Type: Journal    
DOI: 10.1021/jp0274031     Document Type: Article

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