Thin polymer films prepared by radio frequency plasma sputtering of polytetrafluoroethylene and polyetherimide targets

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 3 pt 2, 1996, Pages 1330-1338

  Hishmeh, G A ^a   Barr, T L ^a   Sklyarov, A ^a   Hardcastle, S ^a  

^a Midwest Research Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOURIER TRANSFORM INFRARED SPECTROSCOPY; ION BEAMS; MOLECULAR STRUCTURE; PLASMA APPLICATIONS; POLYETHERIMIDES; POLYMERIZATION; POLYTETRAFLUOROETHYLENES; SCANNING ELECTRON MICROSCOPY; SPUTTERING; ULTRAVIOLET SPECTROSCOPY; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

DIFFUSE REFLECTANCE MODE; ION BEAM SPUTTERING; PLASMA POLYMERIZATION; POLYMER FILMS; RADIOFREQUENCY PLASMA SPUTTERING; RESIDUAL GAS ANALYZER;

THIN FILMS;

EID: 0030144957     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579950     Document Type: Article

References (18)