|
Volumn 218, Issue , 1997, Pages 44-49
|
RF magnetron sputtering of polymers
a a a a a |
Author keywords
[No Author keywords available]
|
Indexed keywords
ANISOTROPY;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
GLOW DISCHARGES;
LIGHT ABSORPTION;
LIGHT POLARIZATION;
MAGNETRON SPUTTERING;
POLYETHYLENES;
POLYTETRAFLUOROETHYLENES;
SELF SPUTTERING GLOW DISCHARGE MODES;
PLASTIC FILMS;
|
EID: 0031549334
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(97)00196-8 Document Type: Article |
Times cited : (35)
|
References (16)
|