Hot-wire thin-film transistors on PET at 100 °C

Thin Solid Films

Volumn 430, Issue 1-2, 2003, Pages 240-244

  Conde, J P ^a   Alpuim, P ^a,b,c   Chu, V ^b  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

^b INESC   (Portugal)

^c UNIVERSITY OF MINHO   (Portugal)

Author keywords

Hot wire chemical vapor deposition; PET; Plastic substrates; Polyimide; Thermal annealing; Thin film transistors

Indexed keywords

AMORPHOUS SILICON; ANNEALING; CHEMICAL VAPOR DEPOSITION; POLYETHYLENE TEREPHTHALATES; POLYIMIDES; SUBSTRATES;

PLASTIC SUBSTRATES;

THIN FILM TRANSISTORS;

EID: 0038188513     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00115-9     Document Type: Conference Paper

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