Thin-film transistors on PET at 100°C

Materials Research Society Symposium - Proceedings

Volumn 715, Issue , 2002, Pages 679-684

  Conde, J P ^a   Alpuim, P ^a,b   Chu, V ^b  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

^b INESC   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ANNEALING; ELECTRONIC PROPERTIES; LOW TEMPERATURE PROPERTIES; POLYETHYLENE TEREPHTHALATES; SEMICONDUCTOR DEVICE MANUFACTURE; THERMAL EFFECTS;

HYDROGEN DILUTION; LOW TEMPERATURE ACTIVE LAYER; MAXIMUM PROCESSING TEMPERATURE;

THIN FILM TRANSISTORS;

EID: 0036920127     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-715-a3.1     Document Type: Conference Paper

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