BioMEMS and microfluidics applications of surface micromachining technology

2001 Microelectromechanical Systems Conference, MEMS 2001

Volumn , Issue , 2002, Pages 1-3

  Okandan, M ^a   Galambos, P ^a   Mani, S ^a   Jakubczak, J ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEMS; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; MEMS; MICROELECTRONIC PROCESSING; MICROELECTRONICS; MICROFLUIDICS; MICROMACHINING; MICROMECHANICS;

CMOS PROCESSING; KEY FEATURE; MANUFACTURABILITY; MICRO-FABRICATION TECHNOLOGY; POLYSILICON SURFACE-MICROMACHINING; PROCESSING TECHNOLOGIES; SURFACE MICROMACHINING TECHNOLOGY;

SURFACE MICROMACHINING;

EID: 84963815688     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSC.2001.992727     Document Type: Conference Paper

References (3)

1. http://www.mdl.sandia.gov/micromachine for bibliography.
2. P Galambos, K Zavadil, R Givler, F Peter, A Gooray, G Roller, and J Crowley, "A Surface Micromachined Electrostatic Drop Ejector", Transducers '01, June 2001 (submitted).
3. M Stay, "Simulation, Design and Performance of Surface Micromachined Peristaltic Pumps", Masters Thesis, University of Colorado, Dept. of Chemical Engineering, December 2000.