SMA micro pumps and switching valves for biochemical IC family

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 2000, Pages 169-174

  Ikuta, Koji ^a   Hasegawa, Tadahiro ^a   Adachi, Takao ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FEEDBACK CONTROL; FLUIDIC DEVICES; LITHOGRAPHY; MICROACTUATORS; MICROELECTRONIC PROCESSING; MICROPROCESSOR CHIPS; PUMPS; SHAPE MEMORY EFFECT; VALVES (MECHANICAL);

BIOCHEMICAL IC FAMILY; MICRO PUMP CHIP; SHAPE MEMORY ALLOY MICRO ACTUATOR; SWITCHING VALVE CHIP;

MICROELECTROMECHANICAL DEVICES;

EID: 0034590043     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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3. K. Ikuta, Artificial Life, MIT Press. pp. 17-23, (1996)
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6. S. Maruo and K. Ikuta, Proc. of 10th International Conference on Solid-State Sensors and Actuators (Transducers '99), pp.1232-1235 (1999).
7. K.Ikuta, T.Hasegawa, T.Adachi and S.Maruo, Proc. 13th IEEE International Micro Electro Mechanical Systems Conference (MEMS2000), pp.739-744, (2000)