Microvalve with ultra-low leakage

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 323-326

  Hirano, Motohisa ^a   Yanagisawa, Keiichi ^a   Kuwano, Hiroki ^a   Nakano, Satoko ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HELIUM; MICROELECTROMECHANICAL DEVICES; NANOSTRUCTURED MATERIALS; PRESSURE MEASUREMENT;

MICROVALVES;

VALVES (MECHANICAL);

EID: 0030718118     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)