First self-priming and bi-directional valve-less diffuser micropump for both liquid and gas

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 674-679

  van der Wijngaart, Wouter ^a   Andersson, Helene ^a   Enoksson, Peter ^a   Noren, Kjell ^a   Stemme, Goran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

MELTING; MICROACTUATORS; REACTIVE ION ETCHING;

MICRODIFFUSER PUMPS;

PUMPS;

EID: 0033709140     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)