MEMS micro-valve arrays for fluidic control

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 66, Issue , 1998, Pages 145-151

  Wroblewski, Donald E ^a   Horenstein, Mark ^a   Vandelli, Nelsimar ^a   Velonis, Margo ^a   Bifano, Thomas ^a  

^a BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC DEVICES; FLOW CONTROL; FLUID MECHANICS; LINEAR CONTROL SYSTEMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING;

MICROFLUIDIC CONTROL; MICROVALVE ARRAYS;

VALVES (MECHANICAL);

EID: 0032300482     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)