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Volumn 66, Issue , 1998, Pages 145-151
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MEMS micro-valve arrays for fluidic control
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ELECTROSTATIC DEVICES;
FLOW CONTROL;
FLUID MECHANICS;
LINEAR CONTROL SYSTEMS;
MICROACTUATORS;
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
MICROFLUIDIC CONTROL;
MICROVALVE ARRAYS;
VALVES (MECHANICAL);
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EID: 0032300482
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (9)
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References (9)
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