Low-cost technology for high-density microvalve arrays using polydimethylsiloxane (PDMS)

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 531-534

  Hosokawa, K ^a   Maeda, R ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTOMERS; HYSTERESIS; MOLDING; SILICON; SPIN COATING;

POLYDIMETHYLSILOXANE (PDMS);

VALVES (MECHANICAL);

EID: 0035013830     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)